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Fast, Self-Nulling Spectroscopic Ellipsometer: Instrumentation and Application. Revision

机译：快速自消光光谱椭偏仪：仪器和应用。调整

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The advantages of rapid spectral scanning have been combined with the inherent accuracy of a compensating ellipsometer operated in the polarizer-compensator-sample-analyzer configuration. Wavelength is varied over the visible-uv (370 to 720 nm) at a maximum rate of 114 nm/s by rotating a continuously-variable interference filter. A three-reflection Fresnel rhomb serves as the achromatic quarter-wave compensator. A microcomputer is used to collect spectroscopic measurements, perform instrument calibrations, digital filtering and interpret data. Wavelength-independent parameters of multiple-film optical models have been determined by treating measurements of delta and psi at different wavelengths as independent measurements. Experimental and predicted ellipsometer measurements are compared by use of statistical techniques for the determination of optimum values and confidence limits of model parameters. (ERA citation 08:054765)

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