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Investigation of the Penning Phenomenon in Magnetron Ion Source Plasma

机译：磁控离子源等离子体中潘宁现象的研究

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The influence of the Penning phenomenon on He atom ionization in plasma of a magnetron ion source has been studied by means of an electromagnetic isotope separator. The analyses of processes taking place in the source have been carried out and the obtained results compared with theoretical predictions. Conclusions that are of practical use for isotope separation by the magnetron separator are made. (Atomindex citation 10:438781)

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作者
Moczka, D.; Zuk, W.; Gromova, I. I.;
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年度 1978
页码 p.1-13
总页数 13
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Electromagnetic isotope separators; Helium; Ion sources; Argon; Comparative evaluations; Current density; Gases; Ionization; Ionization potential; Mercury ions; Penning effect; Plasma; Xenon;

机译：电磁同位素分离器;氦;离子源;氩;比较评价;电流密度;气体;电离;电离势;汞离子;潘宁效应;等离子体;氙;

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专利

1. H- beam emittance measurements for the Penning and the asymmetric, grooved magnetron surface‐plasma sources [J] . Review of Scientific Instruments . 1982,第4期

机译：潘宁和不对称的带槽磁控表面等离子源的H射线发射测量
2. High power impulse magnetron sputtering and related discharges: Scalable plasma sources for plasma-based ion implantation and deposition [J] . Anders A. Surface & Coatings Technology . 2010,第18a19期

机译：大功率脉冲磁控溅射和相关放电：可扩展的等离子体源，用于基于等离子体的离子注入和沉积
3. Experimental investigation of near anode phenomenon in inverted cylindrical magnetron discharge [J] . Rane R., Bandyopadhyay P., Bandyopadhyay M., Physics of plasmas . 2018,第6aPta2期

机译：倒圆柱磁控磁阻会近阳极现象的实验研究
4. Open Source Software Development and the Small World Phenomenon: An Empirical Investigation of Macro Level Collaboration Network Properties on Project Success [C] . Param Vir Singh International conference on information systems (ICIS 2007) . 2007

机译：开源软件开发与小世界现象：对项目成功的宏观协作网络属性的实证研究
5. Investigation of Ion and Electron Energy Distributions in Radio Frequency and Mid-frequency plasmas in Magnetron Systems. [D] . Mensah, Samuel Lartey. 2011

机译：研究磁控管系统中射频和中频等离子体中的离子和电子能量分布。
6. Open‐Source Software Analysis Tool to Investigate Space Plasma Turbulence and Nonlinear DYNamics (ODYN) [O] . E. Teodorescu, M.M. Echim -1

机译：开源软件分析工具用于研究空间等离子体湍流和非线性动力学（ODYN）
7. Investigation of a steady-state cylindrical magnetron discharge for plasma immersion treatment [O] . I. Levchenko, M. Romanov, M. Keidar 2003

机译：稳态圆柱形磁控管放电对等离子体浸渍处理的研究
8. H Exp - Beam Emittance Measurements for the Penning and the Asymmetric, Grooved Magnetron Surface-Plasma Sources [R] . Smith, H. V., Allison, P. W. 1981

机译：H Exp - 用于潘宁和非对称凹槽磁控管表面等离子体源的光束发射率测量

Investigation of the Penning Phenomenon in Magnetron Ion Source Plasma

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