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Thickness Determination of Ultra-Thin Films by Auger Electron Spectroscopy.

机译：俄歇电子能谱法测定超薄膜的厚度。

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The feasibility of using Auger electron peak height ratios for film thickness determination has been demonstrated for ultra-thin films of chromium oxide on gold substrates. The range of equivalent film thicknesses determined was from 3to 67 A,but the technique can measure thicknesses up to approximately 100 A. Using peak ratios from two gold Auger electrons of different energies,the uniformity of the chromium oxide film was demonstrated. It was also demonstrated that argon ion sputtering removed the chromium oxide in a non-uniform manner. The mean free path lengths of 70eV, 527eV,and 2024eV electrons in chromium oxide were determined to be 4.3 A, 14 A,and 28 A,respectively.

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作者
holloway, p. h.;
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年度 1975
页码 1-25
总页数 25
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
thickness gages; performance; chromium oxides; thicknessauger electron spectroscopy; gold;

机译：厚度计;性能;氧化铬;厚度电子能谱;金;

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Thickness Determination of Ultra-Thin Films by Auger Electron Spectroscopy.

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