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Growth of Highly-Oriented Carbon Nanotubes by Plasma-Enhanced Hot Filament Chemical Vapor Deposition; Applied Physics Letters

机译：等离子体增强热丝化学气相沉积制备高取向碳纳米管;应用物理快报

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Highly-oriented, multi-walled carbon nanotubes were grown on polished polycrystalline and single crystal nickel substrates by plasma enhanced hot filament chemical vapor deposition at temperatures below 666 deg C. The carbon nanotubes range from 10 to 500 nm in diameter and 0.1 to 50 pm in length depending on growth conditions. In summary, we synthesized large-area highly-oriented carbon nanotubes at temperatures below 666 deg C by plasma-enhanced hot filament chemical vapor deposition. Acetylene gas is used to provide carbon for nanotube growth and ammonia gas is used for dilution and catalysis. Plasma intensity is critical in determining the nanotube aspect ratios (diameter and length), and range of both site and height distributions within a given film.

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Huang, Z. P. ; Provencio, P. N. ; Ren, Z. F. ; Siegal, M. P. ; Wang, J. H.;
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年度 1998
页码 1-14
总页数 14
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Carbon nanotubes; Filaments; Chemical Vapor Deposition; Plasma chemistry; Acetylene;

机译：碳纳米管;细丝;化学气相沉积;等离子体化学;乙炔;

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专利

1. Growth of carbon nanotubes and nanowires from amorphous carbon films by plasma-enhanced hot filament chemical vapor deposition [J] . Wang B.B., Tang X., Xu X.Z. The journal of physics and chemistry of solids . 2013,第3期

机译：通过等离子增强热丝化学气相沉积法从非晶碳膜中生长碳纳米管和纳米线
2. Study on effects of substrate temperature on growth and structure of alignment carbon nanotubes in plasma-enhanced hot filament chemical vapor deposition system [J] . Chun Dang, Tingzhi Wang Applied Surface Science . 2006,第2期

机译：等离子体增强热丝化学气相沉积系统中衬底温度对取向碳纳米管生长和结构影响的研究
3. Study on effects of substrate temperature on growth and structure of alignment carbon nanotubes in plasma-enhanced hot filament chemical vapor deposition system [J] . Dang C, Wang TZ Applied Surface Science . 2006,第2期

机译：等离子体增强热丝化学气相沉积系统中衬底温度对取向碳纳米管生长和结构影响的研究
4. The Super-capacitor properties of Aligned Carbon nanotubes Array prepared by Radio Frequency Plasma-Enhanced Hot Filament Chemical Vapor Deposition [C] . Yiming Chen, Haiyan Zhang International Conference on Advances in Materials and Manufacturing Processes . 2011

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5. Numerical simulation and emission diagnostics of the gas-phase growth environment during carbon nanotube synthesis by plasma-enhanced chemical vapor deposition. [D] . Garg, Rajesh Kumar. 2006

机译：等离子体增强化学气相沉积法在碳纳米管合成过程中气相生长环境的数值模拟和排放诊断。
6. High Current Emission from Patterned Aligned Carbon Nanotubes Fabricated by Plasma-Enhanced Chemical Vapor Deposition [O] . Linfan Cui, Jiangtao Chen, Bingjun Yang, 2015

机译：等离子体增强化学气相沉积制备的图案化取向碳纳米管的高电流发射
7. Growth of Highly-Oriented Carbon Nanotubes by Plasma-Enhanced Hot Filament Chemical Vapor Deposition [O] . Huang, Z.P., Provencio, P.N., Ren, Z.F., 1998

机译：等离子体增强热丝化学气相沉积法制备高取向碳纳米管

Growth of Highly-Oriented Carbon Nanotubes by Plasma-Enhanced Hot Filament Chemical Vapor Deposition; Applied Physics Letters

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