首页> 美国政府科技报告 >Structural and electrical characterization of highly-tetrahedral- coordinated diamond-like carbon films grown by pulsed-laser deposition

【24h】

Structural and electrical characterization of highly-tetrahedral- coordinated diamond-like carbon films grown by pulsed-laser deposition

机译：通过脉冲激光沉积生长的高四面体配位类金刚石碳膜的结构和电学表征

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

Highly tetrahedral-coordinated-amorphous-carbon (a-tC) films deposited by pulsed-laser deposition (PLD) on silicon substrates are studied. These films are grown at room-temperatures in a high-vacuum ambient, a-tC films grown in this manner have demonstrated stability to temperatures in excess of T = 1000 C, more than sufficient for any post-processing treatment or application. Film surfaces are optically smooth as determined both visually and by atomic-force microscopy. PLD growth parameters can be controlled to produce films with a range of sp(sup 2) - sp(sup 3) carbon-carbon bond ratios. Films with the highest yield of sp(sup 3) C-C bonds have high resistivity, with a dielectric permittivity constant (var epsilon) (approximately) 4, measured capacitively at low frequencies (1--100 kHz). These a-tC films are p-type semiconductors as grown. Schottky barrier diode structures have been fabricated.

著录项

作者
Siegal, M P; Friedmann, T A; Kurtz; Tallant; Simpson, R L;
展开▼
作者单位

展开▼
年度 1994
页码 1-11
总页数 11
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
EDB/360601;

机译：EDB / 360601;

相似文献

外文文献
中文文献
专利

1. 高功率等离子磁控溅射法制备含钛类金刚石碳膜 [J] . YANG Peng, SUNG Chia-chi, FUH Yiin-Kuen, 中国有色金属学报（英文版） . 2012,第006期
2. Structural, magnetic, and electrical properties of NiMnSb thin films grown on InSb by pulsed-laser deposition [J] . Gardelis S, Androulakis J, Giapintzakis J, Applied Physics Letters . 2004,第15期

机译：通过脉冲激光沉积在InSb上生长的NiMnSb薄膜的结构，磁性和电学性质
3. Transport and structural characterization of epitaxial Nd sub(1+x)Ba sub(2-x)Cu sub(3)O sub(y) thin films grown on LaAlO sub(3) and Ni metal substrates by pulsed-laser deposition [J] . Cantoni C, Christen DK, Goyal A, Physica, C. Superconductivity and its applications . 1999,第3期

机译：通过脉冲激光沉积在LaAlOsub（3）和Ni金属衬底上生长的外延Nd sub（1 + x）Ba sub（2-x）Cu sub（3）O sub（y）薄膜的传输和结构表征
4. INFLUENCE OF DEPOSITION PARAMETERS ON THE STRUCTURAL, OPTICAL AND ELECTRICAL PROPERTIES OF AMORPHOUS CARBON AND AMORPHOUS CARBON NITRIDE FILMS GROWN BY PULSED LASER DEPOSITION USING CAMPHORIC CARBON TARGET [J] . M. Rusop, X. M. Tian, T. Soga Molecular Crystals and Liquid Crystals Science and Technology, Section A. Molecular Crystals and Liquid Crystals . 2002,第0期

机译：沉积参数对非晶碳和脉冲碳沉积生长的非晶碳膜结构，光学和电学性能的影响
5. UNDOPED DIAMOND-LIKE CARBON THIN FILMS GROWN BY DIRECT CURRENT-PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION: STRUCTURAL AND ELECTRICAL PROPERTIES [C] . Jackie Chen Keng Yik, Karim Deraman, Ong Wai Kit International Conference on Science and Engineering of Materials . 2014

机译：通过直接电流 - 等离子体增强化学气相沉积的未掺杂的金刚石碳薄膜：结构和电气性能
6. Deposition, characterization and tribological/magnetic studies of diamond-like carbon and magnetic thin films [D] . Wang, Geng 1997

机译：类金刚石碳和磁性薄膜的沉积，表征和摩擦/磁学研究
7. Effects of Rapid Thermal Annealing on the Structural Electrical and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition [O] . Jingjin Wu, Yinchao Zhao, Ce Zhou Zhao, 2016

机译：快速热退火对原子层沉积生长Zr掺杂ZnO薄膜的结构电学和光学性质的影响
8. Structural, magnetic, and electrical properties of NiMnSb thin films grown on InSb by pulsed-laser deposition [O] . Gardelis S., Androulakis J., Giapintzakis J., 2004

机译：通过脉冲激光沉积在InSb上生长的NiMnSb薄膜的结构，磁性和电学性质
9. Surface structure of tetrahedral-coordinated amorphous diamond-like carbon films grown by pulsed laser deposition [R] . Mercer, T. W. , DiNardo, N. J. , Martinez-Miranda, L. J. , 1994

机译：通过脉冲激光沉积生长的四面体配位非晶类金刚石碳膜的表面结构

Structural and electrical characterization of highly-tetrahedral- coordinated diamond-like carbon films grown by pulsed-laser deposition

摘要

著录项

相似文献

相关主题

期刊订阅