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Fabricating functionally graded films with designed gradient profiles using pulsed laser deposition

机译：使用脉冲激光沉积制备具有设计梯度轮廓的功能梯度薄膜

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摘要

A novel picosecond-laser pulsed laser deposition method has been developed for fabricating functionally graded films with pre-designed gradient profiles. Theoretically, the developed method is capable of precisely fabricating films with any thicknesses and any gradient profiles by controlling the laser beam powers for the two different targets based on the film composition profiles. As an implementation example, we have successfully constructed functionally graded diamond-like carbon films with six different gradient profiles: linear, quadratic, cubic, square root, cubic root, and sinusoidal. Energy dispersive X-ray spectroscopy is employed for investigating the chemical composition along the thickness of the film, and the deposition profile and thickness errors are found to be less than 3% and 1.04%, respectively. To the best of the authors' knowledge, this is the first method for fabricating films with designed gradient profiles and has huge potential in many areas of coatings and films, including multifunctional optical films. We believe that this method is not only limited to the example considered in this study, but also can be applied to all material combinations as long as they can be deposited using the pulsed laser deposition technique.
机译：已经开发出一种新颖的皮秒激光脉冲激光沉积方法，用于制造具有预先设计的梯度轮廓的功能梯度膜。从理论上讲，通过基于膜组成分布图控制两个不同目标的激光束功率，所开发的方法能够精确地制造具有任何厚度和梯度分布的膜。作为一个实现示例，我们已经成功构建了功能梯度的类金刚石碳膜，具有六种不同的梯度分布：线性，二次，立方，平方根，立方根和正弦曲线。能量色散X射线光谱法用于研究沿薄膜厚度的化学成分，沉积分布和厚度误差分别小于3％和1.04％。据作者所知，这是制造具有设计梯度轮廓的薄膜的第一种方法，并且在涂料和薄膜的许多领域（包括多功能光学薄膜）具有巨大的潜力。我们认为，该方法不仅限于本研究中考虑的示例，而且还可以应用于所有材料组合，只要它们可以使用脉冲激光沉积技术进行沉积即可。

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  • 作者

    Won Yoo Jai; Ki Hyungson;

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  • 年度 2014
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  • 原文格式 PDF
  • 正文语种 eng
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