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首页> 外文OA文献 >Copper and iron based thin film nanocomposites prepared by radio-frequency sputtering. Part II: elaboration and characterization of oxide/oxide thin film nanocomposites using controlled ex-situ oxidation process
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Copper and iron based thin film nanocomposites prepared by radio-frequency sputtering. Part II: elaboration and characterization of oxide/oxide thin film nanocomposites using controlled ex-situ oxidation process

机译：通过射频溅射制备的铜和铁基薄膜纳米复合材料。第二部分：使用可控的非原位氧化工艺制备和表征氧化物/氧化物薄膜纳米复合材料

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摘要

CuO/CuFe2O4 thin films were obtained on glass substrate by ex situ oxidation in air at 450°C for 12 h from various starting metal/oxide nanocomposites by radio-frequency sputtering technique. The structure and microstructure of the films were examined using grazing incidence X-ray diffraction, Raman spectroscopy, scanning and transmission electronmicroscopies, X-ray photoelectron spectroscopy, and electron probe microanalysis. These studies reveal that a selforganized bi-layered microstructure with CuO (surface layer) and CuFe2O4 (heart layer) was systematically obtained. Due to the porosity of the upper layer formed during annealing, an increase in total thickness of the film was observed and is directly correlated to the oxidation of the metallic copper content initially present in the as-deposited sample. A selforganization in twostacked layers CuO/CuFe2O4with various void fractions ranging from 0 to 41 % can be obtained by controlling the as-deposited elaboration step described in the part I of this paper. The highest porosities were observed for films deposited at low argon pressure and low target-to-substrate distance. Due to their specific self-organization in p- and n-type layers associated with their high porosity, such structured films exhibited the best electrical sensitivity to CO2 gas sensing. The obtained results demonstrated the importance of microstructure control to improve the response of sensingudlayers.
机译：通过射频溅射技术从各种起始金属/氧化物纳米复合材料中，在空气中于450°C下于空气中进行非原位氧化12小时，从而在玻璃基板上获得了CuO / CuFe2O4薄膜。使用掠入射X射线衍射，拉曼光谱，扫描和透射电子显微镜，X射线光电子能谱和电子探针显微分析来检查薄膜的结构和微观结构。这些研究表明，系统地获得了具有CuO（表面层）和CuFe2O4（心脏层）的自组织双层微观结构。由于在退火期间形成的上层的孔隙率，观察到膜的总厚度增加，并且与沉积的样品中最初存在的金属铜含量的氧化直接相关。通过控制本文第一部分所述的沉积精制步骤，可以得到两层CuO / CuFe2O4的自组织，其孔隙率范围为0至41％。在低氩气压力和低靶到基片距离下沉积的薄膜观察到最高孔隙率。由于它们在p型和n型层中具有特定的自组织性，以及它们的高孔隙率，因此此类结构化膜对CO2气体传感表现出最佳的电敏感性。获得的结果证明了微结构控制对于改善传感层的响应的重要性。

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