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Star-Shaped Polymers In The Low Molecular Weight Regime And Their Application As Low Roughness Photoresists

机译：低分子量体系中的星形聚合物及其在低粗糙度光刻胶中的应用

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摘要

Polymers synthesized with a star-shaped architecture can exhibit properties that differ from linear polymers. This has led several industries to use star polymers in their products. The utility of star polymers is currently restricted to high molecular weight applications because it is difficult to reproducibly isolate well controlled, low molecular weight star polymers. Consequently, little is known about the properties or behavior of star polymers in the low molecular weight regime. In this work, low molecular star polymers are reproducibly prepared using atom transfer radical polymerization. From simple homopolymers to more complex terpolymer compositions, stars with different cores, numbers of arms and arm lengths are studied. The potential of star polymers as photoresists is investigated to demonstrate the ability of stars in an application that requires extremely low (sub-10 kg/mol) molecular weights. Lithographic performance is comprehensively examined over a range of processing conditions using combinatorial techniques. This study reveals that the conformation of star polymers can result in smoother lithographic features, addressing a key challenge facing the photoresist community.
机译：用星形结构合成的聚合物可以表现出不同于线性聚合物的性能。这导致一些行业在其产品中使用星形聚合物。由于难以可再现地分离良好控制的低分子量星形聚合物，因此星形聚合物的用途目前仅限于高分子量应用。因此，对于星形聚合物在低分子量范围内的性质或行为知之甚少。在这项工作中，使用原子转移自由基聚合可重复地制备低分子星形聚合物。从简单的均聚物到更复杂的三元共聚物组成，都研究了具有不同芯，臂数和臂长的恒星。研究了星形聚合物作为光致抗蚀剂的潜力，以证明星形在要求极低（低于10 kg / mol）分子量的应用中的能力。使用组合技术在一系列处理条件下全面检查了光刻性能。这项研究表明，星形聚合物的构象可以产生更平滑的光刻特征，从而解决了光刻胶界面临的一个关键挑战。

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    Forman Drew;

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  • 年度 2011
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  • 正文语种 en_US
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