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Nanocomposite thin films for miniaturized multi-ayer ceramic capacitors prepared from barium titanate nanoparticle based hybrid solutions

机译:基于钛酸钡纳米粒子的混合溶液制备的用于多层陶瓷电容器的纳米复合薄膜

摘要

In the present work a flexible approach for the wet chemical processing of nanocomposite functional thin films is demonstrated. Barium titanate (BTO) based nanocomposite thin films for future miniaturized multi-layer ceramic capacitors are chosen as model systems to introduce the concept of "hybrid solutions" which consist of stabile mixtures of reverse micelle derived BTO nanoparticle dispersions and conventional molecular precursor solutions of either the same (BTO:BTO) or a specifically different material such as zirconia (BTO:ZrO2). While in the case of using BTO:BTO hybrid solutions an interesting mode of microstructure control is found, the use of BTO:ZrO2 hybrid solutions with various BTO : ZrO2 ratios leads to nanocomposite films. BTO:BTO hybrid solutions yield columnar grown films with excellent permittivities up to 1050 with a significantly reduced number of coating steps at 700 degrees C. Low values of the temperature coefficient of capacitance are realized in the BTO-ZrO2 nanocomposite thin films. The observed dielectric behavior of these films is explained based on the formation of a core-shell type microstructure on the nanoscale. A detailed high resolution transmission electron microscopy study combined with Raman spectroscopy and X-ray diffraction gives evidence for the proposed BTO-ZrO2 nanocomposite character of these thin films.
机译:在本工作中,展示了一种用于湿法化学处理纳米复合功能薄膜的灵活方法。选择用于未来小型化多层陶瓷电容器的基于钛酸钡(BTO)的纳米复合薄膜作为模型系统,以引入“混合溶液”的概念,该混合溶液由反胶束衍生的BTO纳米颗粒分散体的稳定混合物和任一种的常规分子前体溶液组成相同(BTO:BTO)或特别不同的材料,例如氧化锆(BTO:ZrO2)。在使用BTO:BTO混合溶液的情况下,发现了一种有趣的微结构控制模式,而使用具有不同BTO:ZrO2比率的BTO:ZrO2混合溶液会产生纳米复合膜。 BTO:BTO混合溶液可生产出柱状生长膜,其电容率高达1050,在700摄氏度下的涂覆步骤显着减少。BTO-ZrO2纳米复合薄膜的电容温度系数值低。这些膜的观察到的介电行为是基于纳米尺度上核壳型微结构的形成来解释的。结合拉曼光谱和X射线衍射进行的详细高分辨率透射电子显微镜研究为这些薄膜的拟议BTO-ZrO2纳米复合特征提供了证据。

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