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Capacitive micromachined ultrasonic transducers with piston-shaped membranes : fabrication and experimental characterization

机译：具有活塞形膜的电容式微加工超声换能器：制造和实验表征

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摘要

Capacitive micromachined ultrasonic transducers (CMUTs) featuring piston-shaped membranes (piston CMUTs) were developed to improve device performance in terms of transmission efficiency, reception sensitivity, and fractional bandwidth (FBW). A piston CMUT has a relatively flat active moving surface whose membrane motion is closer to ideal piston-type motion compared with a CMUT with uniformly thick membranes (classical CMUT). Piston CMUTs with a more uniform surface displacement profile can achieve high output pressure with a relatively small electrode separation. The improved device capacitance and gap uniformity also enhance detection sensitivity. By adding a center mass to the membrane, a large ratio of second-order resonant frequency to first-order resonant frequency was achieved. This improved the FBW. Piston CMUTs featuring membranes of different geometric shapes were designed and fabricated using wafer bonding. Fabricating piston CMUTs is a more complex process than fabricating CMUTs with uniformly thick membranes. However, no yield loss was observed. These devices achieved ~100% improvement in transduction performance (transmission and reception) over classical CMUTs. For CMUTs with square and rectangular membranes, the FBW increased from ~110% to ~150% and from ~140% to ~175%, respectively, compared with classical CMUTs. The new devices produced a maximum output pressure exceeding 1 MPa at the transducer surface. Performance optimization using geometric membrane shape configurations was the same in both piston CMUTs and classical CMUTs.
机译：开发了具有活塞形膜（活塞CMUT）的电容式微加工超声换能器（CMUT），以提高设备的传输效率，接收灵敏度和分数带宽（FBW）性能。活塞CMUT具有相对平坦的主动运动表面，与具有均匀厚度的膜的CMUT（经典CMUT）相比，其膜运动更接近理想的活塞型运动。具有更均匀的表面位移轮廓的活塞CMUT可以以相对较小的电极间距实现高输出压力。改善的器件电容和间隙均匀性也提高了检测灵敏度。通过在膜上增加中心质量，可以实现较大的二阶共振频率与一阶共振频率之比。这改善了FBW。使用晶圆键合设计和制造了具有不同几何形状膜的活塞CMUT。与制造具有均匀厚度膜的CMUT相比，制造活塞CMUT是更复杂的过程。然而，没有观察到产率损失。与传统的CMUT相比，这些设备的转导性能（传输和接收）提高了约100％。与经典CMUT相比，对于具有方形和矩形膜的CMUT，FBW分别从〜110％增加到〜150％，从〜140％增加到〜175％。新设备在换能器表面产生的最大输出压力超过1 MPa。使用几何膜形状配置的性能优化在活塞CMUT和传统CMUT中都是相同的。

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