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Femtosecond laser-induced patterned transfer of intact semiconductor and polymer thin films via a digital micromirror device

机译:通过数字微镜器件进行飞秒激光诱导的完整半导体和聚合物薄膜的图案化转移

摘要

The laser-induced forward transfer (LIFT) of thin films is an attractive technique to deposit materials on a size scale that can span nanometres to millimeters. During LIFT, the energy of a laser pulse is absorbed in a small volume of a thin film (donor) causing an explosive expansion which is used to propel a portion of the donor away from the carrier substrate and transfer it onto a receiver substrate as shown in Fig.1(a). Ultrashort laser systems can limit laser damage to remaining areas of the donor usually present using laser systems with longer (nanosecond) pulse widths.
机译:薄膜的激光诱导正向转移(LIFT)是一种有吸引力的技术,可以沉积可跨越纳米到毫米大小的材料。如图所示,在LIFT期间,激光脉冲的能量会吸收到少量的薄膜(施主)中,引起爆炸性膨胀,该爆炸性作用用来推动施主的一部分离开载体基板并将其转移到接收器基板上,如图所示在图1(a)中。超短激光系统可以将激光损坏限制在使用较长(纳秒)脉冲宽度的激光系统时通常存在的供体剩余区域。

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