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Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

机译：modeling and manufacturing of a micromachined magnetic sensor Using the CmOs process without any post-process

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摘要

The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 mm complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD is utilized to analyze the electrical properties and carriers motion path of the magneto-transistor. A readout circuit is used to amplify the voltage difference of the bases into the output voltage. Experiments show that the sensitivity of the magnetic sensor is 354 mV/T at the supply current of 4 mA.

机译：介绍了基于磁晶体管的磁微传感器的建模与制造。磁传感器通过商业0.18毫米互补金属氧化物半导体（CMOS）工艺制造，无需任何后处理。有限元方法（FEM）软件Sentaurus TCAD用于分析电磁晶体管的电学特性和载流子运动路径。读出电路用于将基极的电压差放大为输出电压。实验表明，在4 mA的供电电流下，磁传感器的灵敏度为354 mV / T。

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Tseng Jian-Zhi; Wu Chyan-Chyi; Dai Ching-Liang;
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年度 2015
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正文语种 en
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专利

1. Study of CMOS integrated signal processing circuit in capacitive sensors [J] . CAO Yi-jiang, YU Xiang, WANG Lei 哈尔滨工业大学学报（英文版） . 2007,第002期
2. Modeling and motion control simulation of tendon based parallel manipulator translation mechanism for sensor based high value waste processing [J] . HUANG Jiu, T. Pretz, BIAN Zheng-fu 中南大学学报（英文版） . 2011,第006期
3. Modeling and finite element analysis of transduction process of electromagnetic acoustic transducers for nonferromagnetic metal material testing [J] . HAO Kuan-sheng, HUANG Song-ling, ZHAO Wei, 中南大学学报（英文版） . 2011,第003期
4. Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process [J] . Ching-Liang Dai, Chyan-Chyi Wu, Jian-Zhi Tseng Sensors . 2014,第4期

机译：无需任何后处理的使用CMOS工艺的微机械磁传感器的建模和制造
5. A CMOS-COMPATIBLE 2-D VERTICAL HALL MAGNETIC-FIELD SENSOR USING ACTIVE CARRIER CONFINEMENT AND POST-PROCESS MICROMACHINING [J] . Paranjape M., Kahrizi M., Landsberger LM. Sensors and Actuators, A. Physical . 1996,第1a3期

机译：使用有源载流子限制和后处理微加工的CMOS兼容二维垂直霍尔磁场传感器
6. A micromachined tunable resonator fabricated by the CMOS post-process of etching silicon dioxide [J] . Ching-Liang Dai, Wei-Chiang Yu Microsystem technologies . 2006,第8期

机译：通过对二氧化硅进行蚀刻的CMOS后处理制成的微机械可调谐振器
7. In situ characterization of CMOS post-process micromachining [C] . Warneke, B., Pister, . 2000

机译：CMOS后处理微加工的原位表征
8. Design, modeling, simulation, and testing of resonant micromachined magnetic field sensors. [D] . Bahreyni, Behraad. 2006

机译：谐振微机械磁场传感器的设计，建模，仿真和测试。
9. Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process [O] . Jian-Zhi Tseng, Chyan-Chyi Wu, Ching-Liang Dai 2014

机译：使用CMOS工艺的微机械磁传感器的建模和制造无需任何后处理
10. Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process [O] . Jian-Zhi Tseng, Chyan-Chyi Wu, Ching-Liang Dai 2014

机译：使用CmOs工艺建模和制造微机械磁传感器，无需任何后处理
11. Micromachined sensor systems on a chip: The integration of MEMS with CMOS and its applications [R] . Smith, J. , Montague, S. , Sniegowski, J. 1997

机译：芯片上的微机械传感器系统：mEms与CmOs的集成及其应用

Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

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