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Fabrication of polyimide based microfluidic channels for biosensor devices

机译：用于生物传感器装置的聚酰亚胺基微流体通道的制造

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摘要

The ever-increasing complexity of the fabrication process of Point-of-care (POC) devices, due to high demand of functional versatility, compact size and ease-of-use, emphasizes the need of multifunctional materials that can be used to simplify this process. Polymers, currently in use for the fabrication of the often needed microfluidic channels, have limitations in terms of their physicochemical properties. Therefore, the use of a multipurpose biocompatible material with better resistance to the chemical, thermal and electrical environment, along with capability of forming closed channel microfluidics is inevitable. This paper demonstrates a novel technique of fabricating microfluidic devices using polyimide (PI) which fulfills the aforementioned properties criteria. A fabrication process to pattern microfluidic channels, using partially cured PI, has been developed by using a dry etching method. The etching parameters are optimized and compared to those used for fully cured PI. Moreover, the formation of closed microfluidic channel on wafer level by bonding two partially cured PI layers or a partially cured PI to glass with high bond strength has been demonstrated. The reproducibility in uniformity of PI is also compared to the most commonly used SU8 polymer, which is a near UV sensitive epoxy resin. The potential applications of PI processing are POC and biosensor devices integrated with microelectronics.
机译：由于对功能多功能性，紧凑的尺寸和易用性的高要求，即时医疗（POC）器件的制造工艺日趋复杂，这突出了对多功能材料的需求，这些材料可用于简化此过程。处理。当前用于制造经常需要的微流体通道的聚合物在其物理化学性质方面具有局限性。因此，不可避免的是使用对化学，热和电环境具有更好耐受性的多用途生物相容性材料，以及形成闭合通道微流体的能力。本文展示了一种满足上述性能标准的使用聚酰亚胺（PI）的微流控器件制造新技术。已经通过使用干蚀刻方法开发了使用部分固化的PI来图案化微流体通道的制造工艺。优化蚀刻参数，并将其与用于完全固化的PI的参数进行比较。此外，已经证明了通过将两个部分固化的PI层或部分固化的PI粘合到具有高粘合强度的玻璃上而在晶圆级形成闭合的微流体通道。也将PI的均匀性与最常用的SU8聚合物（一种对紫外线敏感的环氧树脂）进行比较。 PI处理的潜在应用是POC和与微电子技术集成的生物传感器设备。

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