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Fabrication of microlens arrays with varied focal lengths on curved surfaces using an electrostatic deformed template

机译:使用静电变形模板在曲面上制造焦距可变的微透镜阵列

摘要

A microlens array (MLA) with varied focal length was fabricated on a curved surface for the application of compound-eye imaging. Electrostatic deformed concave membrane was used as the initial molding template, and the deformation was determined by different applied voltage. By transferring the pattern to another polymeric template and deforming it by negative pressure, MLAs on a curved surface were fabricated successfully by using this molding process and polymeric template. The fabricated MLAs were optically characterized and the result demonstrated a larger field-of-view than that of flat MLAs and better imaging performance than that of MLAs with uniform focal length on curved surfaces. ? 2014 IOP Publishing Ltd.
机译:在曲面上制造了具有可变焦距的微透镜阵列(MLA),以用于复眼成像。将静电变形的凹膜用作初始成型模板,并通过不同的施加电压来确定变形。通过将图案转移到另一个聚合物模板上,并通过负压使其变形,通过使用此成型工艺和聚合物模板,可以成功地在曲面上制造MLA。对制成的MLA进行了光学表征,结果表明,与在平面上具有相同焦距的MLA相比,其视野比平面MLA更大,成像性能更好。 ? 2014 IOP出版有限公司

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