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Device for measuring an object by means of speckle interferometry and associated method
Device for measuring an object by means of speckle interferometry and associated method
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机译:通过散斑干涉测量法测量物体的装置及相关方法
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摘要
Device (1) for measuring an object (2) by means of speckle interferometry, comprising a primary light source (3), a beam splitter (7), the light of the primary light source (3) in an object beam path (4), in which the object (2 ) and a reference beam path (5), and a detection device (8) imaging optical device, characterized in that the primary light source (3) spatially incoherent or spatially partially coherent light emitted to an incoherent intensity average on the detection means (8 ) or that the primary light source (3) is followed by an averaging device (10, 19) which is designed to generate spatially incoherent or spatially partially coherent light from the coherent light emitted by the primary light source (3), resulting in incoherent intensity averaging on the detection device (8) leads.
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