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Device for measuring an object by means of speckle interferometry and associated method

机译:通过散斑干涉测量法测量物体的装置及相关方法

摘要

Device (1) for measuring an object (2) by means of speckle interferometry, comprising a primary light source (3), a beam splitter (7), the light of the primary light source (3) in an object beam path (4), in which the object (2 ) and a reference beam path (5), and a detection device (8) imaging optical device, characterized in that the primary light source (3) spatially incoherent or spatially partially coherent light emitted to an incoherent intensity average on the detection means (8 ) or that the primary light source (3) is followed by an averaging device (10, 19) which is designed to generate spatially incoherent or spatially partially coherent light from the coherent light emitted by the primary light source (3), resulting in incoherent intensity averaging on the detection device (8) leads.
机译:通过散斑干涉测量法测量物体(2)的设备(1),包括一个主光源(3),一个分束器(7),在物体光束路径(4)中的主光源(3)的光),其中物体(2)和参考光路(5),以及检测装置(8)成像光学装置,其特征在于,主光源(3)在空间上不相干或在空间上部分相干的光发射到非相干在检测装置(8)上的平均强度或平均光源(3)之后是平均装置(10、19),该平均装置被设计为从由一次光发射的相干光产生空间上不相干或空间上部分相干的光源(3),导致在检测设备(8)导线上的平均强度不一致。

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