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TEST ELEMENT FOR QUALITY CONTROL OF PRODUCTION OF HIGH VOLTAGE SILICON CARBIDE SILICA DIODES OF SCHOTKA

机译:肖特卡高压碳化硅二氧化硅产品生产质量控制的测试元素

摘要

The field of application of the proposed utility model is microelectronics, namely, it can be used for quality control in the manufacture of silicon carbide-based semiconductor devices. The purpose of the proposed utility model is to increase the control efficiency and its quality in the manufacture of Schottky silicon carbide diodes. for quality control of high-voltage Schottky silicon carbide diodes, which consist of those formed on an epitaxial structure -stand conductivity type planar working transition and separating rings other conductivity type, wherein the test element is a lateral transistor structure with a gap between the planar working junction (collector) and the emitter equal to the distance between the dividing rings test Schottky diode.
机译:提出的本实用新型的应用领域是微电子学,即可以用于制造碳化硅基半导体器件中的质量控制。提出的本实用新型的目的是在肖特基碳化硅二极管的制造中提高控制效率及其质量。用于高压肖特基碳化硅二极管的质量控制,该二极管由在外延结构上形成的那些二极管组成-支架导电类型的平面工作过渡区和其他导电类型的分离环,其中测试元件是横向晶体管结构,在平面之间存在间隙工作结点(集电极)和发射极之间的距离等于测试肖特基二极管的分隔环之间的距离。

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