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180 W/mk 230 W/mk Memufacturing method of conductivity AlN subtrate having thermal conductivity of 180 W/mk to 230 W/mk
180 W/mk 230 W/mk Memufacturing method of conductivity AlN subtrate having thermal conductivity of 180 W/mk to 230 W/mk
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机译：180 W / mk 230 W / mk热导率在180 W / mk至230 W / mk之间的导电率AlN精矿的制造方法
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摘要
The present invention relates to a method of manufacturing an aluminum nitride substrate having a thermal conductivity of 180 W/mk to 230 W/mk, which is calcined from an aluminum nitride raw material and nitrided containing 0.1 to 1 part by weight of oxygen relative to 100 parts by weight of aluminum nitride. Aluminum nitride powder production step for producing aluminum powder, and a mixed powder in which the aluminum nitride powder and sintering aid are mixed in a solvent containing a dispersing agent, a ball body and a binder are added and stirred to prepare a slurry to prepare a slurry. 180 comprising a green sheet manufacturing step of forming the slurry into a thin film shape and drying it to produce a green sheet, and a substrate manufacturing step of cutting the molded green sheet to a predetermined size to produce a substrate. Provided is a method of manufacturing an aluminum nitride substrate having thermal conductivity of W/mk to 230 W/mk. According to the present invention as described above, by providing an aluminum nitride powder having a uniform particle diameter and a low oxygen content, and adding a sintering aid having a particle size of submicron to the provided aluminum nitride powder, thermal conductivity of 180 W/mk to 230 W/mk It has a very good, high molding density and uniform effect.
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