An inspection apparatus for inspecting a substrate by a tester by bringing a plurality of probes of a probe card into contact with a substrate, comprising: mounting a substrate for alignment having a plurality of first marks on a stage, and placing the substrate for alignment on the stage. A member for positioning, which has a plurality of second marks at positions corresponding to the first marks on the alignment substrate, and is made of a transparent body simulating the probe card, is mounted at a predetermined position of the mounting portion of the probe card. And, positioning the alignment substrate at a predetermined position in the contact area directly under the positioning member, and provided at positions corresponding to each of the second marks above the positioning member, in which the photographing direction is a vertical direction. The second mark and the first mark are photographed by a positioning camera to detect a horizontal deviation of the second mark and the first mark, and when the deviation is within the allowable range, the probe of the substrate and the probe card It has to guarantee the contact precision of.
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