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CAPACITIVE RF-MEMS SWITCH

机译:电容式RF-MEMS开关

摘要

Disclosed is a capacitive RF-MEMS switch. The switch comprises an insulating plate, first to third microstrip lines, an insulating dielectric, N anchor points, and a switch piece. The switch piece comprises a movable metal film and N elastic fixed beams. The first to third microstrip lines are sequentially disposed on the insulating plate. The insulating dielectric is placed on the second microstrip line. The N anchor points are disposed on a microstrip line different from the second microstrip line. One end of the N elastic fixed beams of the switch piece is respectively connected to the movable metal film, and the other end of the switch piece is connected to the anchor points. The elastic fixed beams in the present invention have low elastic coefficients so that a pull-down voltage of the switch is decreased, thereby obtaining a high switching capacitance ratio and a high radio frequency turn-off property. Accordingly, the speed of the switch is fast. At the same time, decreasing the elastic coefficient of the switch can decrease a driving voltage thereof. On the other hand, a novel elastic fixed beam structure is used for the switch, which can reduce the switch area compared with the conventional long fixed beam.
机译:公开了一种电容RF-MEMS开关。该开关包括绝缘板,第一至第三微带线,绝缘电介质,N个锚定点和开关片。开关件包括可移动的金属膜和N个弹性的固定梁。第一至第三微带线依次设置在绝缘板上。绝缘电介质放置在第二条微带线上。 N个锚定点设置在与第二微带线不同的微带线上。开关片的N个弹性固定梁的一端分别与可动金属膜相连,开关片的另一端与固定点相连。本发明中的弹性固定梁具有低弹性系数,从而降低了开关的下拉电压,从而获得了高的开关电容比和高的射频截止性能。因此,开关的速度很快。同时,减小开关的弹性系数可以减小其驱动电压。另一方面,新型的弹性固定梁结构用于开关,与传统的长固定梁相比,可以减小开关面积。

著录项

  • 公开/公告号WO2020206585A1

    专利类型

  • 公开/公告日2020-10-15

    原文格式PDF

  • 申请/专利权人 SHENZHEN UNIVERSITY;

    申请/专利号WO2019CN81720

  • 发明设计人 JIANG MEI;XIONG WENTAO;

    申请日2019-04-08

  • 分类号H01H59;

  • 国家 WO

  • 入库时间 2022-08-21 11:09:02

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