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AN APPARATUS FOR TRANSPORTING A SUBSTRATE, A TREATMENT APPARATUS HAVING A RECEIVING PLATE ADAPTED TO A SUBSTRATE CARRIER OF SUCH AN APPARATUS AND A METHOD OF PROCESSING A SUBSTRATE USING SUCH AN APPAR
AN APPARATUS FOR TRANSPORTING A SUBSTRATE, A TREATMENT APPARATUS HAVING A RECEIVING PLATE ADAPTED TO A SUBSTRATE CARRIER OF SUCH AN APPARATUS AND A METHOD OF PROCESSING A SUBSTRATE USING SUCH AN APPAR
The invention relates to a device for transporting a substrate into or away from a treatment device, a treatment device, a method for processing a substrate and a treatment facility with a movement arrangement for moving a device of this kind for transporting a substrate. The device for transporting a substrate comprises a substrate carrier which contains a horizontally extending retaining surface and one or more grippers. The retaining surface is even and uniform on a first surface facing the substrate and the form thereof substantially corresponds to the form of the substrate. The surface thereof is substantially the same as the surface of the substrate, wherein the substrate is retained by its rear side on the retaining surface only by its weight. The treatment device has a receiving plate on which the substrate is retained during the treatment, wherein the receiving plate has a depression in a first surface which is suitable for accommodating a substrate carrier of this kind during treatment of the substrate.
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