首页> 外国专利> Method of generating power impulses to generate a glow discharge between electrodes in a chamber with a reduced gas pressure and system for generating power impulses to generate a glow discharge between electrodes in a chamber with a reduced gas pressure

Method of generating power impulses to generate a glow discharge between electrodes in a chamber with a reduced gas pressure and system for generating power impulses to generate a glow discharge between electrodes in a chamber with a reduced gas pressure

机译：产生功率脉冲以在具有减小的气体压力的腔室中的电极之间产生辉光放电的方法以及用于产生功率脉冲以在具有减小的气体压力的腔室中的电极之间产生辉光放电的系统

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摘要

The method is that pulses are generated using a low power generator (PWM) and then their power and voltage are increased to the level necessary to ignite and maintain the combustion charge between the electrodes (A, K),where their shape, amplitude are determined,the frequency of repetition and, where applicable, the level of the constant voltage amplitude, so that the amount and intensity of the plasma resonance stimulation in the time unit correspond to the maximum power of the coherent resonance oscillations. The system is characterized by the fact that at least one pair of anode (A) and cathode (K) electrodes are simultaneously clamped,of which each pair of electrodes (A, K) is enclosed in a chamber (LA),a high frequency capacitor (CHF) is connected,The pulse amplifier (A, K) is connected simultaneously to the electrode clamps and the pulse amplifier is connected to the source of the control signals.

机译：该方法是使用低功率发生器（PWM）生成脉冲，然后将其功率和电压增加到点燃和维持电极（A，K）之间的燃烧电荷所需的水平，并确定其形状，幅度频率，重复频率以及恒定电压幅度的电平（如果适用），以使时间单位内的等离子体共振刺激的数量和强度与相干共振振荡的最大功率相对应。该系统的特征在于，至少一对阳极电极（A）和阴极电极（K）被同时夹持，其中每对电极（A，K）被封闭在一个高频室（LA）中连接电容器（CHF），脉冲放大器（A，K）同时连接到电极夹，脉冲放大器连接到控制信号源。

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公开/公告号PL426539A1

专利类型
公开/公告日2020-02-10

原文格式PDF
申请/专利权人 RESZKE EDWARD;YELKIN IHAR;
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申请/专利号PL20180426539
发明设计人 EDWARD RESZKE;IHAR YELKIN;
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申请日2018-08-03
分类号H05B41;H05B41/02;H05B41/36;H01J7/46;H01J61/56;
国家 PL
入库时间 2022-08-21 11:16:28

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