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METHOD FOR FABRICATING MACH-ZEHNDER MODULATOR, MACH-ZEHNDER MODULATOR
METHOD FOR FABRICATING MACH-ZEHNDER MODULATOR, MACH-ZEHNDER MODULATOR
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机译：制造MACH-ZEHNDER调制器的方法，MACH-ZEHNDER调制器
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摘要
A method for fabricating a Mach-Zehnder modulator includes: preparing a substrate product having a waveguide mesa, an embedding resin body and an inorganic insulator, the waveguide mesa being disposed on a supporting base, the inorganic insulator covering the embedding resin body to separate the embedding resin body from the waveguide mesa, the waveguide mesa having top and side faces covered with the inorganic insulator, and the embedding resin body embedding the side face of the waveguide mesa; forming an opening in the inorganic insulator by etching to form an inorganic insulating region, the opening reaching the top face of the waveguide mesa, the inorganic insulating region covering the embedding resin body and the side face of the inorganic insulator; and forming an ohmic electrode in the opening to make contact with the top face of the mesa, the inorganic insulating region separating the ohmic electrode from the embedding resin body.
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