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CLASSIFICATION, SEARCH AND RETRIEVAL OF SEMICONDUCTOR PROCESSING METROLOGY IMAGES USING DEEP LEARNING/CONVOLUTIONAL NEURAL NETWORKS
CLASSIFICATION, SEARCH AND RETRIEVAL OF SEMICONDUCTOR PROCESSING METROLOGY IMAGES USING DEEP LEARNING/CONVOLUTIONAL NEURAL NETWORKS
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机译:基于深度学习/卷积神经网络的半导体加工计量学图像的分类,搜索和检索
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摘要
A method of classifying substrates with a metrology tool is herein disclosed. The method begins by training a deep learning framework using convolutional neural networks with a training dataset for classifying image dataset. Obtaining a new image from the meteorology tool. Running the new image through the deep learning framework to classify the new image.
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