首页>
外国专利>
Classification, search and retrieval of semiconductor processing metrology images using deep learning/convolutional neural networks
Classification, search and retrieval of semiconductor processing metrology images using deep learning/convolutional neural networks
展开▼
机译:使用深度学习/卷积神经网络对半导体加工计量图像进行分类,搜索和检索
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method of classifying substrates with a metrology tool is herein disclosed. The method begins by training a deep learning framework using convolutional neural networks with a training dataset for classifying image dataset. Obtaining a new image from the meteorology tool. Running the new image through the deep learning framework to classify the new image.
展开▼