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BAMBOO-LIKE COPPER CRYSTAL PARTICLES HAVING A HIGHLY PREFERRED ORIENTATION
BAMBOO-LIKE COPPER CRYSTAL PARTICLES HAVING A HIGHLY PREFERRED ORIENTATION
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机译:像竹子一样的铜结晶颗粒具有较高的取向
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摘要
An electroplating copper layer includes bamboo-like copper crystal particles having a highly preferred orientation. The bamboo-like copper crystal particles have a long axis direction and a short axis direction, and the bamboo-like copper crystal particles have a length of 20 nm to 5 μm in the long axis direction and a length of 20 nm to 2 μm in the short axis direction. The bamboo-like copper crystal particles have a uniform particle size, and the electroplating copper layer has a major diffraction peak at a 2θ angle of about 44°.
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