首页> 外国专利> BAMBOO-LIKE COPPER CRYSTAL PARTICLES HAVING A HIGHLY PREFERRED ORIENTATION

BAMBOO-LIKE COPPER CRYSTAL PARTICLES HAVING A HIGHLY PREFERRED ORIENTATION

机译:像竹子一样的铜结晶颗粒具有较高的取向

摘要

An electroplating copper layer includes bamboo-like copper crystal particles having a highly preferred orientation. The bamboo-like copper crystal particles have a long axis direction and a short axis direction, and the bamboo-like copper crystal particles have a length of 20 nm to 5 μm in the long axis direction and a length of 20 nm to 2 μm in the short axis direction. The bamboo-like copper crystal particles have a uniform particle size, and the electroplating copper layer has a major diffraction peak at a 2θ angle of about 44°.
机译:电镀铜层包括具有高度优选取向的竹状铜晶体颗粒。所述竹状铜晶体颗粒具有长轴方向和短轴方向,并且所述竹状铜晶体颗粒在长轴方向上的长度为20nm至5μm,在硅中的长度为20nm至2μm。短轴方向。竹状铜晶体颗粒具有均匀的粒径,并且电镀铜层在约44°的2θ角处具有主衍射峰。

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