首页>
外国专利>
Copper crystal particles having a highly preferred orientation and a preparation method thereof
Copper crystal particles having a highly preferred orientation and a preparation method thereof
展开▼
机译:具有高度优选取向的铜晶体颗粒及其制备方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
An electroplating copper layer includes bamboo-like copper crystal particles having a highly preferred orientation. The bamboo-like copper crystal particles have a long axis direction and a short axis direction, and the bamboo-like copper crystal particles have a length of 20 nm to 5 μm in the long axis direction and a length of 20 nm to 2 μm in the short axis direction. A method of preparing the bamboo-like copper crystal particles is also disclosed.
展开▼