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Copper crystal particles having a highly preferred orientation and a preparation method thereof

机译:具有高度优选取向的铜晶体颗粒及其制备方法

摘要

An electroplating copper layer includes bamboo-like copper crystal particles having a highly preferred orientation. The bamboo-like copper crystal particles have a long axis direction and a short axis direction, and the bamboo-like copper crystal particles have a length of 20 nm to 5 μm in the long axis direction and a length of 20 nm to 2 μm in the short axis direction. A method of preparing the bamboo-like copper crystal particles is also disclosed.
机译:电镀铜层包括具有高度优选取向的竹状铜晶体颗粒。所述竹状铜晶体颗粒具有长轴方向和短轴方向,并且所述竹状铜晶体颗粒在长轴方向上的长度为20nm至5μm,在硅中的长度为20nm至2μm。短轴方向。还公开了一种制备竹状铜晶体颗粒的方法。

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