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APPARATUS AND METHOD FOR LARGE-SCALE HIGH THROUGHPUT QUANTITATIVE CHARACTERIZATION AND THREE-DIMENSIONAL RECONSTRUCTION OF MATERIAL STRUCTURE

机译：材料结构的大规模高通量定量表征和三维重构的装置和方法

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摘要

An apparatus and method for a large-scale high-throughput quantitative characterization and three-dimensional reconstruction of a material structure. The apparatus having a glow discharge sputtering unit, a sample transfer device, a scanning electron microscope unit and a GPU computer workstation. The glow discharge sputtering unit can achieve large size (cm order), nearly flat and fast sample preparation, and controllable achieve layer-by-layer ablation preparation along the depth direction of the sample surface; rapid scanning electron microscopy (SEM) can achieve large-scale and high-throughput acquisition of sample characteristic maps. The sample transfer device is responsible for transferring the sample between the glow discharge sputtering source and the scanning electron microscope in an accurately positioning manner. The GPU computer workstation performs splicing, processing, recognition and quantitative distribution characterization on the acquired sample characteristic maps, and carries out three-dimensional reconstruction of the structure of the sample prepared by layer-by-layer sputtering.
机译：一种用于材料结构的大规模高通量定量表征和三维重建的设备和方法。该设备具有辉光放电溅射单元，样品转移装置，扫描电子显微镜单元和GPU计算机工作站。辉光放电溅射装置可实现大尺寸（厘米级），近平​​整且快速的样品制备，并且可控地实现沿样品表面深度方向的逐层烧蚀制备;快速扫描电子显微镜（SEM）可以实现大规模，高通量采集样品特征图。样品转移装置负责以精确定位的方式在辉光放电溅射源和扫描电子显微镜之间转移样品。 GPU计算机工作站对获取的样品特征图进行拼接，处理，识别和定量分布表征，并对通过逐层溅射制备的样品的结构进行三维重构。

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