To deform a substrate without deviations.SOLUTION: A substrate holding stage according to an embodiment that holds a substrate by suction includes a substrate holding surface, a base, a fixing member, and a fluid supply pipe. The fixing member fixes the holding surface to the base while securing an internal space between a back surface side of the holding surface and the base. The fluid supply pipe is provided such that fluid can be supplied to and discharged from an internal space. The holding surface is formed such that a rear surface side is substantially spherical, and a front surface side is provided so as to be capable of being convex-deformed according to an internal pressure of the internal space which changes due to the fluid supplied to and discharged from the fluid supply pipe.SELECTED DRAWING: Figure 15A
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