首页> 外国专利> Lens array, wavefront sensor, wavefront measuring device, shape measuring device, aberration measuring device, optical element manufacturing method, and optical device manufacturing method

Lens array, wavefront sensor, wavefront measuring device, shape measuring device, aberration measuring device, optical element manufacturing method, and optical device manufacturing method

机译:透镜阵列,波前传感器,波前测量装置,形状测量装置,像差测量装置,光学元件制造方法和光学装置制造方法

摘要

A lens array includes a plurality of lenses that collect divided test light and form spots. Each lens includes a lens member, and a light shielding mask provided concentric to the lens member along a perimeter edge thereof, the light shielding mask shielding a part of the light and transmitting a part of the light. The light shielding mask is formed to satisfy a predetermined mathematical condition of light transmission.
机译:透镜阵列包括收集分离的测试光并形成斑点的多个透镜。每个透镜包括透镜构件,以及沿其透镜构件的周边与透镜构件同心设置的遮光罩,该遮光罩屏蔽一部分光并且透射一部分光。形成遮光掩模以满足光透射的预定数学条件。

著录项

  • 公开/公告号JP6622515B2

    专利类型

  • 公开/公告日2019-12-18

    原文格式PDF

  • 申请/专利权人 キヤノン株式会社;

    申请/专利号JP20150166393

  • 发明设计人 前田 充史;

    申请日2015-08-26

  • 分类号G02B3;G01B11/24;G02B5;G01M11/02;

  • 国家 JP

  • 入库时间 2022-08-21 11:35:13

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