首页>
外国专利>
BIAXIAL RESONANT MICROELECTROMECHANICAL MIRROR STRUCTURE WITH PIEZOELECTRIC ACTUATION HAVING IMPROVED CHARACTERISTICS
BIAXIAL RESONANT MICROELECTROMECHANICAL MIRROR STRUCTURE WITH PIEZOELECTRIC ACTUATION HAVING IMPROVED CHARACTERISTICS
展开▼
机译：具有改善特性的压电致动双轴共振微机电镜结构
展开▼
页面导航
摘要
著录项
相似文献
摘要
A microelectromechanical structure (10) has: a body of semiconductor material having a fixed frame (11) internally defining a cavity (12); a mobile mass (14) elastically suspended in the cavity and movable with a first resonant movement of rotation about a first rotation axis (R1) and with a second resonant movement of rotation about a second rotation axis (R2), orthogonal to the first rotation axis (R1); a first (16a, 16b) and a second pair (16c, 16d) of supporting elements, which extend in a cantilever fashion in the cavity, are rigidly coupled to the frame, and can be deformed by piezoelectric effect to cause rotation of the mobile mass about the first rotation axis and the second rotation axis; and a first (30a, 30b) and a second (30c, 30d) pair of elastic-coupling elements, elastically coupled between the mobile mass and the first and the second pairs of supporting elements; the first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and the second pairs.
展开▼
