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首页> 外文期刊>Advances in Mechanical Engineering >Structure Design and Stepping Characteristics Analysis of the Biaxial Piezoelectric Actuated Stage Using a Thin-Disc Piezoelectric Actuator
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Structure Design and Stepping Characteristics Analysis of the Biaxial Piezoelectric Actuated Stage Using a Thin-Disc Piezoelectric Actuator

机译：薄膜压电致动器的双轴压电致动平台的结构设计和步进特性分析

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摘要

In this paper, a novel thin-disc piezoelectric actuator, 4-9-9-14 piezoelectric actuator, is used to construct and drive the microanometer level biaxial piezoelectric actuated stage. The 4-9-9-14 piezoelectric actuator offers a better balanced capability of forward rotation and reverse rotation than the conventional edge-driving piezoelectric actuator. The biaxial piezoelectric actuated stage structure comprises a base, a V-shaped guide rail, an optical scale measurement system, a preload adjusting structure, and a load-carrying stage. The movement signals of the piezoelectric actuated stage are read and analyzed by means of NI PCI-6115 data acquisition card and LabVIEW software operating in conjunction with a linear optical scale. The new consideration of tuning T_(on) time is used in place of the traditional method of changing the magnitude of driving voltage to control the stepping distance of the stage. A combined driving signal is based on the sum of a continuous driving signal for T_(on) time and a DC signal for T_(off) time; the combined driving signal is continuously output in this manner to form a continuous driving pulse chain. Under a constant driving voltage, the displacement of the stage increases with T_(on) time and the displacement of the stage decreases with T_(on) time.
机译：在本文中，一种新颖的薄盘压电致动器4-9-9-14压电致动器用于构造和驱动微米/纳米级双轴压电致动平台。与传统的边缘驱动压电致动器相比，4-9-9-14压电致动器具有更好的正向和反向旋转平衡能力。双轴压电致动平台结构包括基座，V形导轨，光学尺测量系统，预载调节结构和承载平台。借助NI PCI-6115数据采集卡和结合线性光学尺运行的LabVIEW软件，可以读取和分析压电驱动平台的运动信号。使用调整T_（on）时间的新方法代替了改变驱动电压大小以控制平台的步进距离的传统方法。组合的驱动信号基于T_（on）时间的连续驱动信号和T_（off）时间的直流信号之和。以这种方式连续输出组合的驱动信号，以形成连续的驱动脉冲链。在恒定的驱动电压下，位移台的位移随T_（on）时间而增加，位移台的位移随T_（on）时间而减小。

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