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Stepping Experiment and Characteristics Analysis of a Novel Biaxial Piezoelectric Actuated Stage

机译：新型双轴压电驱动阶段的步进实验及特性分析

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In this research, our research team used the self-designed piezoelectric actuator to achieve the micro/nanometer level precise positioning biaxial piezoelectric actuated stage through the redesign of stage mechanism. A novel piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive the stage. The movement of the piezoelectric actuated stage is read and analyzed by means of NI PCI-6115 data acquisition card and Lab- VIEW software operating in conjunction with a linear encoder. The new consideration of tuning time T_(on) is used to place of traditional method of changing the magnitude of driving voltage to control the stepping distance of the stage. Under a constant driving voltage, the displacement of the stage increases with time T_(on), and the displacement of the stage decreases with time T_(on). The aforesaid phenomenon occurs to leftward or rightward movement of the upper stage and forward or backward movement of the lower stage. Given a constant time T_(on), the displacement of the stage in motion decreases with the driving voltage, and the displacement of the stage in motion increases with the driving voltage.
机译：在这项研究中，我们的研究团队使用自动设计的压电致动器通过阶段机构的重新设计来实现微/纳米电压精确定位双轴压电驱动阶段。构造了一种新型压电致动器结构 - 4-9-9-14压电致动器，由压电蜂鸣器制成以驱动级。通过NI PCI-6115数据采集卡和实验室软件与线性编码器一起操作，读取压电致动级的移动。调谐时间T_（ON）的新考虑因解传统方法改变驱动电压幅度以控制级的踩踏距离。在恒定的驱动电压下，阶段的位移随时间t_（上）而增加，并且阶段的位移随时间t_（开）减小。上述上级的向左或向右移动的前述现象以及下级的向前或向后运动发生。给定恒定时间t_（开启），阶段在运动中的位移随着驱动电压而减小，并且级在运动中的位移随着驱动电压而增加。

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