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Method and system including neural network and forward physical model for semiconductor applications
Method and system including neural network and forward physical model for semiconductor applications
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机译：包括神经网络和用于半导体应用的前向物理模型的方法和系统
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摘要
A method and system for training a neural network are provided. One system includes one or more components that are executed by one or more computer subsystems. One or more components configured to reconstruct an input image from an inverse feature to thereby generate an output image set corresponding to an input image of the training set, the neural network configured to determine an inverse feature of an input image of a training set for a sample input to a neural network, A forward physical model, and a residual layer configured to determine a difference between an input image of the training set and a corresponding output image set. The one or more computer subsystems are configured to modify one or more parameters of the neural network based on the determined difference to thereby learn the neural network.
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