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Molded Interconnect Microelectromechanical Systems (MEMS) Device Package
Molded Interconnect Microelectromechanical Systems (MEMS) Device Package
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机译:模压互连微机电系统(MEMS)器件封装
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摘要
A microelectromechanical systems (MEMS) device package for encapsulating a MEMS device includes a conductive lead and a molded package spacer connected to the substrate. The molded package spacers form one of the sidewalls or partitions of the MEMS device package and are adapted to connect the electrical connection from the MEMS device to the substrate or to the second MEMS device package through the substrate.
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