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Molded Interconnect Microelectromechanical Systems (MEMS) Device Package

机译:模压互连微机电系统(MEMS)器件封装

摘要

A microelectromechanical systems (MEMS) device package for encapsulating a MEMS device includes a conductive lead and a molded package spacer connected to the substrate. The molded package spacers form one of the sidewalls or partitions of the MEMS device package and are adapted to connect the electrical connection from the MEMS device to the substrate or to the second MEMS device package through the substrate.
机译:用于封装MEMS器件的微机电系统(MEMS)器件封装包括导电引线和连接至基板的模制封装间隔物。模制的封装间隔物形成MEMS器件封装的侧壁或分隔壁之一,并且适于将电连接从MEMS器件连接到基板或通过基板连接到第二MEMS器件封装。

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