首页>
外国专利>
HIGH-THROUGHPUT MANUFACTURING OF PHOTONIC INTEGRATED CIRCUIT (PIC) WAVEGUIDES USING MULTIPLE EXPOSURES
HIGH-THROUGHPUT MANUFACTURING OF PHOTONIC INTEGRATED CIRCUIT (PIC) WAVEGUIDES USING MULTIPLE EXPOSURES
展开▼
机译：使用多次曝光的光子集成电路（PIC）波导的高通量制造
展开▼
页面导航
摘要
著录项
相似文献
摘要
In accordance with a method of forming a waveguide in a polymer film disposed on a substrate, a plurality of regions on a polymer film are selectively exposed to a first dosage of radiation. The polymer film is formed from a material having a refractive index that decreases by exposure to the radiation and subsequent heating. At least one region of the polymer film that was not previously exposed to the radiation is selectively exposing to a second dosage of radiation. The second dosage of radiation is less than the first dosage of radiation. The polymer film is heated to complete curing of the polymer film.
展开▼
