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METHOD FOR PRODUCING A GAS-SENSITIVE NANOCRYSTALLINE LAYER STRUCTURE, CORRESPONDING GAS-SENSITIVE NANOCRYSTALLINE LAYER STRUCTURE, AND GAS SENSOR WITH A CORRESPONDING GAS-SENSITIVE NANOCRYSTALLINE LAYER STRUCTURE
METHOD FOR PRODUCING A GAS-SENSITIVE NANOCRYSTALLINE LAYER STRUCTURE, CORRESPONDING GAS-SENSITIVE NANOCRYSTALLINE LAYER STRUCTURE, AND GAS SENSOR WITH A CORRESPONDING GAS-SENSITIVE NANOCRYSTALLINE LAYER STRUCTURE
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机译：制备气敏性纳米层结构，相应的气敏性纳米层结构和具有相应的气敏性纳米层结构的气体传感器的方法
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摘要
The invention relates to a method for producing a gas-sensitive nanocrystalline layer structure, a corresponding gas-sensitive nanocrystalline layer structure, and a gas sensor with a corresponding gas-sensitive nanocrystalline layer structure. The method for producing a gas-sensitive nanocrystalline layer structure (201) on a substrate (101) has the steps of: depositing a base layer (102) made of a base material, depositing a doped layer (103) made of a doped material, repeating the aforementioned steps, and carrying out an annealing step, whereby a nanocrystalline gas-sensitive layer structure (200) is produced.
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