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Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
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机译：压电线性致动器，压电驱动阀和流量控制装置
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摘要
A piezoelectric linear actuator includes a laminated piezoelectric actuator, a lower support member that supports the laminated piezoelectric actuator, a pressing member that biases the laminated piezoelectric actuator from the top thereof, a guide member connected to the lower support member to guide the pressing member; and a displacement transmission member which includes a pair of displacement transmission plates, an adjustment screw connected to the pair of displacement transmission plates, an output section connected to the pair of displacement transmission plates, and an elastic body that biases the output section downward.
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