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Achromatic rotating-element ellipsometer and method for measuring mueller-matrix elements of sample using the same
Achromatic rotating-element ellipsometer and method for measuring mueller-matrix elements of sample using the same
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机译:消色差椭圆偏振仪和使用其的样品穆勒矩阵元素测量方法
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摘要
The present invention relates to an optical element rotation type ellipsometer, and more particularly, to an ellipsometer used to measure Mueller-matrix components of a sample by measuring and analyzing a change in a polarization state of light reflected or transmitted by the sample.;According to the exemplary embodiment of the present invention, it is possible to provide the achromatic rotating-element ellipsometer and the method for measuring Mueller-matrix elements of a sample using the same capable of measuring the Mueller-matrix elements of the anisotropic sample as well as the isotropic sample by using four polarizers.
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