首页> 外国专利> Achromatic rotating-element ellipsometer and method for measuring mueller-matrix elements of sample using the same

Achromatic rotating-element ellipsometer and method for measuring mueller-matrix elements of sample using the same

机译:消色差椭圆偏振仪和使用其的样品穆勒矩阵元素测量方法

摘要

The present invention relates to an optical element rotation type ellipsometer, and more particularly, to an ellipsometer used to measure Mueller-matrix components of a sample by measuring and analyzing a change in a polarization state of light reflected or transmitted by the sample.;According to the exemplary embodiment of the present invention, it is possible to provide the achromatic rotating-element ellipsometer and the method for measuring Mueller-matrix elements of a sample using the same capable of measuring the Mueller-matrix elements of the anisotropic sample as well as the isotropic sample by using four polarizers.
机译:椭圆仪技术领域本发明涉及一种光学元件旋转型椭圆仪,更具体地,涉及一种通过测量和分析样品反射或透射的光的偏振态的变化来测量样品的穆勒矩阵分量的椭圆仪。在本发明的示例性实施例中,可以提供一种消色差旋转椭圆仪以及使用能够测量各向异性样品的穆勒矩阵元素的方法来测量样品的穆勒矩阵元素的方法,以及通过使用四个偏振器来实现各向同性样品。

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