首页> 外国专利> Tunable MEMS Fabry-Perot Filter

Tunable MEMS Fabry-Perot Filter

机译:可调谐MEMS法布里-珀罗滤波器

摘要

A wavelength tunable gain medium with the use of micro-electromechanical system (MEMS) based Fabry-Perot (FP) filter cavity tuning is provided as a tunable laser. The system comprises a laser cavity and a filter cavity for wavelength selection. The laser cavity consists of a gain medium such as a Semiconductor Optical Amplifier (SOA), two collimating lenses and an end reflector. The MEMS-FP filter cavity comprises a fixed reflector and a moveable reflector, controllable by electrostatic force. By moving the MEMS reflector, the wavelength can be tuned by changing the FP filter cavity length. The MEMS FP filter cavity displacement can be tuned discretely with a step voltage, or continuously by using a continuous driving voltage. The driving frequency for continuous tuning can be a resonance frequency or any other frequency of the MEMS structure, and the tuning range can cover different tuning ranges such as 30 nm, 40 nm, and more than 100 nm.
机译:提供了一种基于微机电系统(MEMS)的法布里-珀罗(FP)滤波器腔调谐的波长可调增益介质,作为可调激光器。该系统包括用于波长选择的激光腔和滤光腔。激光腔由诸如半导体光放大器(SOA)的增益介质,两个准直透镜和一个端反射器组成。 MEMS-FP过滤器腔包含一个固定的反射器和一个可移动的反射器,可通过静电力控制。通过移动MEMS反射器,可以通过更改FP滤镜腔的长度来调节波长。可以通过阶跃电压离散地调整MEMS FP滤波器腔的位移,或者通过使用连续的驱动电压连续地调整。用于连续调谐的驱动频率可以是谐振频率或MEMS结构的任何其他频率,并且调谐范围可以覆盖不同的调谐范围,诸如30nm,40nm以及大于100nm。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号