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APPARATUS AND METHOD FOR CONTROLLING OZONE GENERATION AMOUNT
APPARATUS AND METHOD FOR CONTROLLING OZONE GENERATION AMOUNT
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机译：用于控制臭氧发生量的装置和方法
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摘要
PROBLEM TO BE SOLVED: To provide an apparatus and method for controlling the amount of generated ozone which can increase the response of the ozone generation amount to a change in its target amount.SOLUTION: An ozone generating apparatus 30 comprises: an ozone generator 36 generating ozone by applying AC voltage to a discharge electrode 38 and supplying a raw material gas into a discharge space 41; and a control device 45 controlling the output of a power source outputting AC voltage. The control device 45 includes a storage part 47 storing a voltage map 51 where the ozone generation amount in the ozone generator 36 is specified in accordance with amplitude and frequency, and controls the output of a power source 37 at an AC voltage having amplitude and frequency selected based on the target amount of the ozone generation amount and the voltage map 51. In the voltage map 51, a first amplitude is specified in a range where the target amount is not larger than a first target amount, and a second amplitude larger than the first amplitude is specified in a range where the target amount is larger than the first target amount and not larger than a second target amount.SELECTED DRAWING: Figure 1
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