To provide a technique capable of performing a contact accuracy assurance without consuming a substrate for positioning.SOLUTION: A position confirmation member mounts thereon a substrate for positioning having a plurality of first marks for positioning on a stage, positions the substrate for positioning on the stage, includes a plurality of second marks for positioning at a position corresponding to the first mark of the substrate for positioning, and is made of a transparent body simulating a probe card. The position confirmation member is attached to a prescribed position of an attaching part to which the probe card is attached, makes the substrate for positioning position at the prescribed position in a contact region just under a member for confirming a position, photographs the second and first marks by a camera for confirming the position in such a state, detects a deviation in a horizontal direction of the second and first marks, and assures a contact accuracy of the substrate and a prove of the prove card when the deviation is within an allowable range.SELECTED DRAWING: Figure 11
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