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HYDROGEN PEROXIDE GAS GENERATING APPARATUS AND HYDROGEN PEROXIDE GAS GENERATING METHOD
HYDROGEN PEROXIDE GAS GENERATING APPARATUS AND HYDROGEN PEROXIDE GAS GENERATING METHOD
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机译:过氧化氢气体产生装置及过氧化氢气体产生方法
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摘要
To provide a hydrogen peroxide gas generating apparatus and a hydrogen peroxide gas generating method capable of supplying a hydrogen peroxide gas with low humidity.SOLUTION: The hydrogen peroxide gas generation apparatus includes a container 2 filled with sodium percarbonate, a heating device 3 for heating the container 2, and a gas supply path A for supplying the gas to the container 2. The container 2 is heated by the heating device 3 and a gas having a temperature lower than a heating temperature of the sodium percarbonate is introduced to the container 2 through the gas supply path A.SELECTED DRAWING: Figure 1
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