• 主题
高级搜索  >
历史搜索 清空历史
首页> 外国专利> REFERENCE-STANDARD DEVICE FOR CALIBRATION OF MEASUREMENTS OF LENGTH, AND CORRESPONDING CALIBRATION PROCESS

REFERENCE-STANDARD DEVICE FOR CALIBRATION OF MEASUREMENTS OF LENGTH, AND CORRESPONDING CALIBRATION PROCESS

机译：参考标准装置，用于校准长度测量和相应的校准过程

页面导航
  • 摘要
  • 著录项
  • 相似文献

摘要

A reference-standard device (20) for calibration of measurements of length, comprising a substrate (10) that includes a surface (10a) having at least one calibration pattern (11). According to the invention, this pattern comprises a plurality of nanometric structures (14), said nanometric structures (14) having one and the same section in the plane of said surface and having the same nanometric dimensions, in particular less than 50 nm, said nanometric structures (14) being arranged at a distance from one another by a constant pitch of nanometric length, in particular less than 50 nm, in at least one direction, said nanometric structures (14) being arranged within spatial regions (12) delimited in one or more directions in the plane of the substrate (10), said nanometric structures (14) being obtained via application to said substrate (10) of a process of nanostructuring (100) by means of a mask of block copolymers in order to make calibrations of measurements of length of the order of nanometres.
机译：一种用于校准长度测量的参考标准设备（20），包括基板（10），该基板包括具有至少一个校准图案（11）的表面（10a）。根据本发明，该图案包括多个纳米结构（14），所述纳米结构（14）在所述表面的平面中具有一个相同的截面并且具有相同的纳米尺寸，特别是小于50nm，所述纳米结构（14）在至少一个方向上彼此间隔开一定距离的纳米长度，特别是小于50nm，所述纳米结构（14）布置在由在基底（10）的平面中的一个或多个方向上，所述纳米结构（14）是通过借助于嵌段​​共聚物的掩模将纳米结构化工艺（100）施加到所述基底（10）上而获得的，以制备纳米级长度测量的校准。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号