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Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner
Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner
An actuator (30) is configured of a frame element (1), a pair of beam elements (3), a movable element (2) rotatably supported by the frame element (1) via the beam elements (3), a driver configured to rotate the movable element (2) relative to the frame element (1) around the beam elements (3) as a rotary shaft; and damper elements (4) provided on the rotary axis (O) of the beam elements (3).
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