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TMDs 2 MODIFYING METHOD FOR TMDs TWO-DIMENSIONAL SHEET BASED ON ION BEAM IRRADIATION

机译:基于离子束辐照的二维薄板TMDs 2改性方法

摘要

According to one embodiment of the present invention, since the electrical characteristics of the TMDs two-dimensional sheet can be changed through irradiation of the ion beam, it is possible to solve side effects caused by chemical treatment such as doping. Also, if the correlation between the irradiation conditions of the ion beam and the electrical characteristics of the TMDs two-dimensional sheet is analyzed and the result is reflected in the fabrication of the TMDs two-dimensional sheet, the electrical characteristics of the TMDs two- The electric characteristics of the sheet can be quantitatively analyzed and controlled. That is, the TMDs two-dimensional sheet manufactured according to one aspect of the present invention can be widely used in the field of electronics such as transistors.
机译:根据本发明的一个实施方式,由于可以通过离子束的照射来改变TMDs二维片的电特性,因此可以解决由化学处理例如掺杂引起的副作用。同样,如果分析离子束的照射条件与TMDs二维片的电特性之间的相关性,并将结果反映在TMDs二维片的制造中,则TMDs二维电特性可以对薄片的电特性进行定量分析和控制。即,根据本发明的一个方面制造的TMDs二维片材可以广泛地用于诸如晶体管的电子领域。

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