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TMDs 2 MODIFYING METHOD FOR TMDs TWO-DIMENSIONAL SHEET BASED ON ION BEAM IRRADIATION

机译:基于离子束辐照的二维薄板TMDs 2改性方法

摘要

According to an embodiment of the present invention, since electric characteristics of the TMDs two-dimensional sheet can be changed through the irradiation of the ion beam, it is possible to reduce side effects caused by chemical treatment such as doping. Further, if the correlation between the irradiation conditions of the ion beam and the electrical characteristics of the TMDs two-dimensional sheet is analyzed and the result is reflected in the production of the TMDs two-dimensional sheet, the electrical characteristics of the TMDs two-dimensional sheet can be controlled as wanted, and it is also possible to quantitatively analyze and control the electrical characteristics of the two-dimensional sheet of TMDs. The TMDs two-dimensional sheet produced according to one aspect of the present invention can be widely used in the electronic industry such as transistors.
机译:根据本发明的实施例,由于可以通过离子束的照射来改变TMDs二维片的电特性,因此可以减少由化学处理例如掺杂引起的副作用。此外,如果分析离子束的照射条件与TMDs二维片的电特性之间的相关性,并将结果反映在TMDs二维片的生产中,则TMDs二维的电特性可以根据需要控制尺寸表,也可以定量分析和控制TMD二维表的电气特性。根据本发明一方面生产的TMDs二维片材可广泛用于电子工业中,例如晶体管。

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