首页>
外国专利>
TMDs 2 MODIFYING METHOD FOR TMDs TWO-DIMENSIONAL SHEET BASED ON ION BEAM IRRADIATION
TMDs 2 MODIFYING METHOD FOR TMDs TWO-DIMENSIONAL SHEET BASED ON ION BEAM IRRADIATION
展开▼
机译:基于离子束辐照的二维薄板TMDs 2改性方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
According to an embodiment of the present invention, since electric characteristics of the TMDs two-dimensional sheet can be changed through the irradiation of the ion beam, it is possible to reduce side effects caused by chemical treatment such as doping. Further, if the correlation between the irradiation conditions of the ion beam and the electrical characteristics of the TMDs two-dimensional sheet is analyzed and the result is reflected in the production of the TMDs two-dimensional sheet, the electrical characteristics of the TMDs two-dimensional sheet can be controlled as wanted, and it is also possible to quantitatively analyze and control the electrical characteristics of the two-dimensional sheet of TMDs. The TMDs two-dimensional sheet produced according to one aspect of the present invention can be widely used in the electronic industry such as transistors.
展开▼