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首页> 外国专利> PATTERN INSPECTION DEVICE, PATTERN POSITION MEASUREMENT DEVICE, AERIAL IMAGE MEASUREMENT SYSTEM, METHOD FOR MEASURING AERIAL IMAGE, PATTERN POSITION REPAIRING DEVICE, METHOD FOR REPAIRING PATTERN POSITION, AERIAL IMAGE DATA PROCESSING DEVICE, METHOD FOR PROCESSING AERIAL IMAGE DATA, PATTERN EXPOSURE DEVICE, METHOD FOR EXPOSING PATTERN, METHOD FOR MANUFACTURING MASK, AND MASK MANUFACTURING SYSTEM

PATTERN INSPECTION DEVICE, PATTERN POSITION MEASUREMENT DEVICE, AERIAL IMAGE MEASUREMENT SYSTEM, METHOD FOR MEASURING AERIAL IMAGE, PATTERN POSITION REPAIRING DEVICE, METHOD FOR REPAIRING PATTERN POSITION, AERIAL IMAGE DATA PROCESSING DEVICE, METHOD FOR PROCESSING AERIAL IMAGE DATA, PATTERN EXPOSURE DEVICE, METHOD FOR EXPOSING PATTERN, METHOD FOR MANUFACTURING MASK, AND MASK MANUFACTURING SYSTEM

机译：图案检查装置，图案位置测量装置，航空图像测量系统，用于测量航空图像的方法，用于图案位置修复的装置，用于图案位置修复的方法，用于航空图像数据处理的装置，用于处理天线的方法，用于处理天线的方法曝光图案，制造面具的方法以及面具制造系统

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According to the present invention, a pattern inspection device comprises: an optical image acquiring unit which acquires optical image data of each divided pattern for a mask positioned by using an alignment mark drawn as a part of each of the divided patterns as a plurality of masks on each of which the divided pattern acquired by dividing a pattern into a plurality of parts for multiple patterning has been formed; a position deviation map creating unit which creates a position deviation map of the divided pattern; a position difference value map creating unit which creates one position difference value map in which a difference value between relative position deviation amounts of each minimum element of the plurality of position deviation maps is defined; a region specifying unit which specifies at least one region, in which the difference value exceeds a threshold of a distance between adjacent patterns, by using the position difference value map; and an output unit which outputs at least coordinates, a type of defect, and information of a reference image for each of the specified regions among the specified regions.;COPYRIGHT KIPO 2018
机译：根据本发明，图案检查装置包括：光学图像获取单元，该光学图像获取单元获取通过使用作为每个分割图案的一部分绘制的对准标记作为多个掩模而定位的掩模的每个分割图案的光学图像数据。在其上已形成通过将图案分成多个部分以进行多个图案获得的分割图案;位置偏差图创建单元，其创建分割图案的位置偏差图;位置差值图创建单元，其创建一个位置差值图，其中定义了多个位置偏差图的每个最小元素的相对位置偏差量之间的差值;区域确定单元，通过使用位置差值图来指定至少一个差值超过相邻图案之间的距离的阈值的区域; COPYRIGHT KIPO 2018;以及输出单元，其至少输出指定区域中的每个指定区域的坐标，缺陷类型和参考图像的信息。

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