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Capacitive MEMS Device, Capacitive MEMS Sound Transducer, Method for Forming a Capacitive MEMS Device, and Method for Operating a Capacitive MEMS Device
Capacitive MEMS Device, Capacitive MEMS Sound Transducer, Method for Forming a Capacitive MEMS Device, and Method for Operating a Capacitive MEMS Device
A capacitive MEMS device, a capacitive MEMS sound transducer, a method for forming a capacitive MEMS device and a method for operating a capacitive MEMS device are disclosed. In an embodiment the capacitive MEMS device includes a first electrode structure comprising a first conductive layer and a second electrode structure comprising a second conductive layer, wherein the second conductive layer at least partially opposes the first conductive layer, and wherein the second conductive layer includes a multiple segmentation which provides an electrical isolation between at least three portions of the second conductive layer.
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