首页>
外国专利>
METHOD FOR CLEANING BONDING INTERFACE BEFORE BONDING
METHOD FOR CLEANING BONDING INTERFACE BEFORE BONDING
展开▼
机译:粘接前清洁粘接界面的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present disclosure provides a method for cleaning a bonding interface before bonding. The method includes: providing a first surface and a second surface for bonding, the first surface being a non-crystal surface and the second surface being a crystal surface; and cleaning the first surface and the second surface with ammonia respectively before bonding, wherein at least one of parameters of an ammonia concentration and a cleaning temperature for cleaning the first surface is higher than a counterpart of parameters for cleaning the second surface.
展开▼