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Modular Stacked Variable-Compression Micropump and Method of Making Same
Modular Stacked Variable-Compression Micropump and Method of Making Same
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机译：模块化堆叠式可变压缩微型泵及其制造方法
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摘要
A micropump assembly is comprised of modular stacked pump stages. The modular pump stages are preferably stacked vertically on top of each other. The stacked design allows each pumping chamber to be compressed by two pumping membranes and thereby provide twice the compression as compared to conventional planar pump designs. The stacked design also eliminates the need for bidirectional movement of the pumping membrane. Lastly, the number of stacked pumping stages can be changed post-fabrication to achieve the required pressure for a given application.
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